Dɔ wɛrɛ ye gazi-fasa fɛɛrɛ ye, kemikali vapor deposition (CAV) fɛɛrɛ, a bɛ fɔ fana ko pirolisi fɛɛrɛ, jalen fɛɛrɛ walima jeni fɛɛrɛ. A ka fɛnɲɛnamafagalanw ye siliyɔmu tetarasikilini, ɔkisizɛni (walima fiɲɛ) ani idɔrɔzi ye, minnu bɛ kɛ ni funteni caman ye.
The reaction equation is: SiCl4+2H2+O2 - >Sio2+4HCL. Fiɲɛ ni idɔrɔzi bɛ kɛ degun, farali, nɛnɛ ani farikolojidɛsɛ, silikajɛli jalen, buguri bɔli ani filɛri sani u ka ci ka don jimafɛnw na minnu bɛ kɛ ni fɛnɲɛnamafagalanw ye. Silikɔni tetarakulori fɛnɲɛnamafagalan cilen kɔfɛ distillation koloma la walasa ka distillation kɛ, a bɛ sumaya ani ka wuli evaporator kɔnɔ, o kɔfɛ a bɛ ci ka taa hydrolysis synthétique la ni fiɲɛ jalen ni filɛtirilen ye i n’a fɔ a tabaga. Silikɔni tetarasikilini bɛ wuli funteni caman na (funteni 1000-1800 degɛrɛ ) o kɔfɛ a bɛ gazi-fasa hydrolyse sɔrɔ ni hidrɔzɛni ni oksizɛni (walima fiɲɛ) hakɛ dɔ ye degere 1800 ɲɔgɔn na Nin yɔrɔ in na, gazi-fasa silisi fɛn minnu bɛ Bɔ olu ka ɲi kosɛbɛ wa u bɛ Kɛ aerosolw ye ni gazi ye, minnu minɛni ka gɛlɛn.
O la, u bɛ fɔlɔ ka fara ɲɔgɔn kan ka kɛ fɛn belebelebaw ye ɲɔgɔndan na, o kɔfɛ, u bɛ lajɛ ni sikɔlɔn faranfasilan ye, ka ci ka taa deacidification foro dɔ la. Gazi-Fase silisi bɛ ko ni azote ye-Fiɲɛ min bɛ sɔrɔ fo pH hakɛ ka kɛ 4 fo 6 ye, o ye fɛn dilannen ye .